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Stationary and mobile monitoring in industry
The MIRO MGA analyzers are compact, mobile and can be easily used, for instance, in mobile incident reaction vehicles performing measurements at chemical plants.
Semiconductor industry
In the semiconductor industry the presence of trace amounts of HONO (HNO2), NO2, NH3 and SO2 molecules in clean room air can cause contamination and damages to wafers during production processes.
MIRO MGA instruments can track very low concentrations of these airborne molecular contaminations (AMC) which is essential for cleanroom operation.
Our customizable MGAs allow to combine various gases within one instrument depending on the requirements.
MIRO’s multi-compound gas analyzers (MGA) are used in:
- Incident reaction monitoring
- Stationary monitoring in chemical and oil & gas industries
- Airborne molecular contamination monitoring in semiconductor processing
- Benefits of MGA analyzers: high precision, compact, mobile, all pollutants in one instrument
Case Studies
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